Download CHEE 5375 Chemical Processing For Microelectronics PDF Free - Full Version
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About CHEE 5375 Chemical Processing For Microelectronics
This document provides information on the course CHEE 5375 - Chemical Processing for Microelectronics. The course applies chemical engineering principles to microelectronic device fabrication and processing. Topics covered include an overview of microelectronic materials and devices, crystal growth, oxidation, diffusion, ion implantation, thin-film deposition, lithography, plasma processing, electrochemical deposition, and process integration. The course aims to provide an understanding of the basic principles and operations of important microelectronic fabrication unit processes. Students will also learn how to quantitatively predict process outcomes using models and apply chemical engineering principles to new areas.
Detailed Information
| Author: | ['Sami White'] |
|---|---|
| Publication Year: | 2020 |
| Pages: | 3 |
| Language: | English |
| Format: | |
| Price: | FREE |
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