Applied Scanning Probe Methods IV: Industrial Applications

317 Pages·2006·6.658 MB·English

by  Joseph M. Kinsella, Albena Ivanisevic (auth.), Professor Bharat Bhushan, Professor Dr. Harald Fuchs (eds.)

NanoScience and Technology
NanoScience and Technology
SeriesEditors:
P.Avouris B.Bhushan K.vonKlitzing H.Sakaki R.Wiesendanger
TheseriesNanoScienceandTechnologyisfocusedonthefascinatingnano-world,meso-
scopicphysics,analysiswithatomicresolution,nanoandquantum-effectdevices,nano-
mechanics and atomic-scale processes. All the basic aspects and technology-oriented
developmentsinthisemergingdisciplinearecoveredbycomprehensiveandtimelybooks.
Theseriesconstitutesasurveyoftherelevantspecialtopics,whicharepresentedbyleading
experts in the field. These books will appeal to researchers, engineers, and advanced
students.
SemiconductorSpintronics MagneticMicroscopy
andQuantumComputation ofNanostructures
Editors:D.D.Awschalom,N.Samarth, Editors:H.HopsterandH.P.Oepen
D.Loss
SiliconQuantumIntegratedCircuits
Nano-Optoelectonics Silicon-Germanium Heterostructure
Concepts,PhysicsandDevices Devices:BasicsandRealisations
Editor:M.Grundmann ByE.Kasper,D.J.Paul
NoncontactAtomicForceMicroscopy ThePhysicsofNanotubes
Editors:S.Morita,R.Wiesendanger, FundamentalsofTheory,Optics
E.Meyer andTransportDevices
Editors:S.V.RotkinandS.Subramoney
Nanoelectrodynamics
ElectronsandElectromagneticFields SingleMoleculeChemistry
inNanometer-ScaleStructures andPhysics
Editor:H.Nejo AnIntroduction
ByC.Wang,C.Bai
SingleOrganicNanoparticles
Editors:H.Masuhara,H.Nakanishi, AtomicForceMicroscopy,Scanning
K.Sasaki NearfieldOpticalMicroscopy
andNanoscratching
EpitaxyofNanostructures Application
ByV.A.Shchukin,N.N.Ledentsovand toRoughandNaturalSurfaces
D.Bimberg ByG.Kaupp
AppliedScanningProbeMethodsI AppliedScanningProbeMethodsII
Editors:B.Bhushan,H.Fuchs, ScanningProbeMicroscopy
S.Hosaka Techniques
Editors:B.Bhushan,H.Fuchs
Nanostructures
TheoryandModeling AppliedScanningProbeMethodsIII
ByC.DelerueandM.Lannoo Characterization
Editors:B.Bhushan,H.Fuchs
NanoscaleCharacterisation
ofFerroelectricMaterials AppliedScanningProbeMethodsIV
ScanningProbeMicroscopyApproach IndustrialApplications
Editors:M.AlexeandA.Gruverman Editors:B.Bhushan,H.Fuchs
Bharat Bhushan
Harald Fuchs (Eds.)
Applied Scanning
Probe Methods IV
Industrial Applications
With176Figures
Including1ColorFigure
123
Editors:
ProfessorBharatBhushan
NanotribologyLaboratoryforInformationStorageandMEMS/NEMS(NLIM)
650AckermanRoad,Suite255,TheOhioStateUniversity
Columbus,OH43202-1107,USA
e-mail:[email protected]
ProfessorDr.HaraldFuchs
CenterforNanotechnology(CeNTech)andInstituteofPhysics
UniversityofMünster,GievenbeckerWeg11,48149Münster,Germany
e-mail:[email protected]
SeriesEditors:
ProfessorDr.PhaedonAvouris
IBMResearchDivision,NanometerScaleScience&Technology
ThomasJ.WatsonResearchCenter,P.O.Box218
YorktownHeights,NY10598,USA
ProfessorBharatBhushan
NanotribologyLaboratoryforInformationStorageandMEMS/NEMS(NLIM)
650AckermanRoad,Suite255,TheOhioStateUniversity
Columbus,OH43202-1107,USA
ProfessorDr.,Dres.h.c.KlausvonKlitzing
Max-Planck-InstitutfürFestkörperforschung,Heisenbergstrasse1
70569Stuttgart,Germany
ProfessorHiroyukiSakaki
UniversityofTokyo,InstituteofIndustrialScience,4-6-1Komaba,Meguro-ku
Tokyo153-8505,Japan
ProfessorDr.RolandWiesendanger
InstitutfürAngewandtePhysik,UniversitätHamburg,Jungiusstrasse11
20355Hamburg,Germany
DOI 10.1007/b137428
ISSN 1434-4904
ISBN-10 3-540-26912-6 SpringerBerlinHeidelbergNewYork
ISBN-13 978-3-540-26912-0 SpringerBerlinHeidelbergNewYork
LibraryofCongressControlNumber:2003059049
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Foreword
The Nobel Prize of 1986 on Scan-
ningTunnelingMicroscopysignaled
a new era in imaging. The scan-
ning probes emerged as a new in-
strument for imaging with a pre-
cision sufficient to delineate single
atoms. Atfirstthereweretwo–the
ScanningTunnelingMicroscope,or
STM,andtheAtomicForceMicro-
scope, or AFM. The STM relies on
electrons tunneling between tip and
sample whereas the AFM depends
on the force acting on the tip when
itwasplacednearthesample.These
were quickly followed by the Mag-
netic Force Microscope, MFM, and
the Electrostatic Force Microscope,
EFM.TheMFMwillimageasinglemagneticbitwithfeaturesassmallas10nm.
WiththeEFMonecanmonitorthechargeofasingleelectron.Prof.PaulHansma
atSantaBarbaraopenedthedoorevenwiderwhenhewasabletoimagebiological
objects in aqueous environments. At this point the sluice gates were opened and
amultitudeofdifferentinstrumentsappeared.
There are significant differences between the Scanning Probe Microscopes or
SPM, and others such as the Scanning Electron Microscope or SEM. The probe
microscopes do not requirepreparation ofthe sample and they operate in ambient
atmosphere, whereas, the SEM must operate in a vacuum environment and the
sample must be cross-sectioned to expose the proper surface. However, the SEM
canrecord3Dimageandmovies,featuresthatarenotavailablewiththescanning
probes.
TheNearFieldOpticalMicroscopeorNSOMisalsomemberofthisfamily.At
thistimetheinstrumentsuffersfromtwolimitations;1)mostoftheopticalenergy
islost as ittraverses thecut-offregionofthetapered fiberand 2)theresolution is
insufficient for many purposes. We are confident that NSOM’s with a reasonable
opticalthroughputandaresolutionof10nmwillsoonappear.TheSNOMwillthen
enterthemainstreamofscanningprobes.
VI Foreword
In the Harmonic Force Microscope or HFM, the cantilever is driven at the
resonantfrequencywiththeamplitudeadjustedsothatthetipimpactsthesampleon
eachcycle. Theforcesbetweentipandsamplegeneratemultipleharmonicsinthe
motionofthecantilever.Thestrengthoftheseharmonicscanbeusedtocharacterize
thephysicalpropertiesofthesurface.
Itis interesting tonotethat this technology has spawned devices ofadifferent
kind.Inoneinstance,thetipisfunctionalizedinawaythatallowstheattachmentof
asingleprotein.Withdrawingthetipfromasurfacestretchestheattachedmolecule
andmeasurestheelasticpropertiesofsingleproteinmolecules.Inanotherthesurface
tensiononthesurfaceofthecantileverismodifiedwithaself-assembledmonolayer
ofmoleculessuchasthiols.Theslightbendingofthebeamiseasilydetectedwith
the components developed for use in the scanning probes. This system is used to
detectthepresencenotonlyofthemonomolecularlayersbutalsoofsinglemolecules
attachedtotheinitialself-assembledmonolayer.
Theextensivematerialinthisfieldmeansthatthevarietyoftopicsislargerthan
canbeaccommodatedinfourvolumes.TheEditors,Profs.BhushanandFuchs,must
havegreatpowersofpersuasionfortheyhavedonearemarkablejobincollecting
this set of paper in a relatively short period of time. The collection will become
amilestoneinthefieldofscanningprobes.
c.f.quate
LelandT.EdwardsProfessor(Research)ofEngineering
StanfordUniversity
Stanford,California
Co-inventerofAFMin1985
Preface
The rapidly increasing activities in nanoscience and nanotechnology supported by
sizable national programs has led to a variety of efforts in the development and
understandingofscanningprobetechniquesaswellastheirapplicationstoindustrial
andmedicalenvironments.Beyondimaging,scanningprobetechniquesrepresenting
the eyes of nanotechnology allows us to investigate surfaces and interfaces close
to surfaces at the nanometer scale and below, thus providing information about
structure,mechanical,electronic,andmagneticproperties.Itbecameapparentduring
thecollectionphaseofVol.Iin2003thatmanymoreactivitiesexistwhichdeserve
presentation. Therefore,thisthreevolumeset waspreparedinordertodisplay the
wide breadth of this field and also to provide an excellent compendium for recent
developments in this area. The response of colleagues and research groups being
askedtocontributehasbeenverypositive,suchthatwedecided,togetherwiththe
publisher,torapidlymoveonintheseareas.Itbecamepossibletocollectexcellent
contributionsdisplayingfirsthandinformationfromleadinglaboratoriesworldwide.
ThepresentvolumesII–IVcoverthreemainareas:scanningprobemicroscopy
(SPM)techniques (Vol.II);characterization (basicaspects,research,Vol.III);and
industrialapplications(Vol.IV).
VolumeIIincludesoverviewsonsensortechnologybasedonSPMprobes,high
harmonic dynamic force microscopy, scanning ion conduction microscopy, spin
polarizedSTM,dynamicforcemicroscopyandspectroscopy,quantitativenanome-
chanical measurements in biology, scanning micro deformation microscopy, elec-
trostaticforceandforcegradientmicroscopyandnearfieldopticalmicroscopy.This
volumealsoincludesacontributiononnearfieldprobemethodssuchasthescanning
focus ion beam technique which is an extremely valuable tool for nanofabrication
includingscanningprobes.
Volume III includes the application of scanning probe methods for the char-
acterization of different materials, mainly in the research stage, such as applica-
tionsofSPMonlivingcellsathighresolution,macromoleculardynamics,organic
supramolecularstructuresunderUHVconditions,STSonorganicandinorganiclow
dimensional systems, and ferroelectric materials, morphological and tribological
characterizationofroughsurfaces,AFMforcontactandwearsimulation,analysis
offullerenelikenanoparticlesandapplicationsinthemagnetictapeindustry.
Themorerelevantindustrialapplications aredescribed inVol.IV,whichdeals
withscanningprobelithographyforchemical, biological andengineeringapplica-
tions, nanofabrication with self-assembled monolayers by scanned probe lithogra-
phy,fabricationofnanometerscalestructuresbylocaloxidation,templateeffectsof
VIII Preface
molecularassemblies,microfabricatedcantileverarrays,nanothermomechanicsand
applicationsofheatedatomicforcemicroscopecantilevers.
Certainly,thedistinctionbetweenbasicresearchfieldsofscanningprobetech-
niques and the applications in industry are not sharp, as becomes apparent in the
distributionoftheindividualarticlesinthedifferentpartsofthesevolumes.Onthe
otherhand,thisclearlyreflectsanextremelyactiveresearchfieldwhichstrengthens
thecooperationbetweennanotechnologyandnanoscience.
Thesuccessoftheseriesissolelybasedontheeffortsandthehugeamountof
workdonebytheauthors.Wegratefullyacknowledgetheirexcellentcontributions
inatimelymannerwhichhelpstoinformscientistsinresearchandindustryabout
latest achievements in scanning probe methods. We also would like to thank Dr.
MarionHertel,SeniorEditorChemistry,andMrs.BeateSiekofSpringerVerlagfor
theircontinuoussupport,withoutwhichthisvolumecouldnevermakeitefficiently
tomarket.
January,2006 Prof.BharatBhushan,USA
Prof.HaraldFuchs,Germany
Contents–VolumeIV
23 ScanningProbeLithographyforChemical,
BiologicalandEngineeringApplications
JosephM.Kinsella,AlbenaIvanisevic . . . . . . . . . . . . . . . . 1
23.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
23.2 ModelingoftheDPNProcess . . . . . . . . . . . . . . . . . . . . 4
23.3 PatterningofBiologicalandBiologicallyActiveMolecules . . . . 7
23.3.1 DNAPatterning . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
23.3.2 ProteinPatterning . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
23.3.3 PeptidePatterning . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
23.3.4 PatterningofTemplatesforBiologicalBottom-UpAssembly . . . 15
23.4 ChemicalPatterning. . . . . . . . . . . . . . . . . . . . . . . . . . 17
23.4.1 Thiols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
23.4.2 ω-SubstitutedThiols . . . . . . . . . . . . . . . . . . . . . . . . . 18
23.4.3 SilanesandSilazanes . . . . . . . . . . . . . . . . . . . . . . . . . 19
23.4.4 DepositionofSolidOrganicInks. . . . . . . . . . . . . . . . . . . 20
23.4.5 Polymers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
23.4.6 Polyelectrolytes . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
23.4.7 Dendrimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
23.4.8 DepositionofSupramolecularMaterials. . . . . . . . . . . . . . . 24
23.4.9 DepositionofMetals . . . . . . . . . . . . . . . . . . . . . . . . . 25
23.4.10 DepositionofSolid-StateMaterials . . . . . . . . . . . . . . . . . 26
23.4.11 DepositionofMagneticMaterials . . . . . . . . . . . . . . . . . . 27
23.5 EngineeringApplicationsofDPN . . . . . . . . . . . . . . . . . . 28
23.6 FutureChallengesandApplications . . . . . . . . . . . . . . . . . 30
23.7 Conclusions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
X Contents–VolumeIV
24 NanotribologicalCharacterizationofHumanHairandSkin
UsingAtomicForceMicroscopy(AFM)
BharatBhushan,CarmenLaTorre . . . . . . . . . . . . . . . . . . 35
24.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
24.2 HumanHair,Skin,andHairCareProducts . . . . . . . . . . . . . 39
24.2.1 HumanHairandSkin . . . . . . . . . . . . . . . . . . . . . . . . . 39
24.2.2 HairCare:CleaningandConditioningTreatments,
andDamagingProcesses . . . . . . . . . . . . . . . . . . . . . . . 46
24.3 ExperimentalTechniques . . . . . . . . . . . . . . . . . . . . . . . 51
24.3.1 ExperimentalProcedure. . . . . . . . . . . . . . . . . . . . . . . . 53
24.3.2 HairandSkinSamples . . . . . . . . . . . . . . . . . . . . . . . . 57
24.4 ResultsandDiscussion . . . . . . . . . . . . . . . . . . . . . . . . 59
24.4.1 SurfaceRoughness,Friction,andAdhesion
forVariousEthnicitiesofHair . . . . . . . . . . . . . . . . . . . . 59
24.4.2 SurfaceRoughness,Friction,andAdhesion
forVirginandChemicallyDamagedCaucasianHair
(withandwithoutCommercialConditionerTreatment). . . . . . . 70
24.4.3 SurfaceRoughness,Friction,andAdhesionforHair
TreatedwithVariousCombinationsofConditionerIngredients . . 78
24.4.4 InvestigationofDirectionalityDependenceandScaleEffects
onFrictionandAdhesionofHair. . . . . . . . . . . . . . . . . . . 85
24.4.5 SurfaceRoughnessandFrictionofSkin . . . . . . . . . . . . . . . 98
24.5 Closure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
25 NanofabricationwithSelf-AssembledMonolayers
byScanningProbeLithography
JayneC.Garno,JamesD.Batteas . . . . . . . . . . . . . . . . . . 105
25.1 SPM-BasedMethodsofLithography . . . . . . . . . . . . . . . . 105
25.1.1 Bias-InducedNanofabrication . . . . . . . . . . . . . . . . . . . . 107
25.1.2 Force-InducedNanofabricationofSAMs . . . . . . . . . . . . . . 108
25.1.3 Dip-PenNanolithography(DPN). . . . . . . . . . . . . . . . . . . 110
25.1.4 AutomatedScanningProbeLithography. . . . . . . . . . . . . . . 111
25.2 PatterningwithSelf-AssembledMonolayers . . . . . . . . . . . . 112
25.2.1 StructureofSAMs. . . . . . . . . . . . . . . . . . . . . . . . . . . 112
25.2.2 ExamplesofSAMNanopatternsGeneratedbyForce-InducedSPL 114
25.2.3 NanofabricationofSAMsbyDPNandBias-InducedSPL . . . . . 118
25.3 DirectedFabricationofPolymericStructures . . . . . . . . . . . . 120