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About Ansys Fluent Tutorial Guide 2022 R2 Removed-4 Removed
The document describes setting up surface chemistry modeling in ANSYS. It discusses defining species, reactions, and reaction mechanisms for a gallium arsenide deposition mixture involving arsine, trimethylgallium, methyl radicals, and hydrogen. Parameters such as molecular weights, heat capacities, transport properties and Lennard-Jones coefficients are specified for the different species.
Detailed Information
| Author: | ['Hassam Ulhaq'] |
|---|---|
| Publication Year: | 2023 |
| Pages: | 91 |
| Language: | English |
| Format: | |
| Price: | FREE |
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