Aberration-corrected Analytical Electron Microscopy (RMS - Royal Microscopical Society)

297 Pages·2011·5.216 MB·English

by  Rik Brydson

Aberration-Corrected
Analytical Transmission
Electron Microscopy
Currentandfuturetitles intheRMS-WileyImprint
Published
Principles and Practice of Variable Pressure/Environmental Scanning
ElectronMicroscopy(VP-ESEM) – DebbieStokes
Aberration-Corrected Analytical Electron Microscopy – Edited by Rik
Brydson
Forthcoming
UnderstandingPracticalLightMicroscopy – JeremySanderson
AtlasofImagesandSpectraforElectronMicroscopists – EditedbyUrsel
Bangert
Diagnostic Electron Microscopy – A Practical Guide to Tissue Prepa-
ration and Interpretation – Edited by John Stirling, Alan Curry &
BrianEyden
PracticalAtomicForceMicroscopy – EditedbyCharlesClifford
Low Voltage Electron Microscopy – Principles and Applications–
EditedbyNatashaErdman&DavidBell
Focused Ion Beam Instrumentation: Techniques and Applications–
DudleyFinch&AlexanderBuxbaum
Aberration-Corrected
Analytical Transmission
Electron Microscopy
Edited by
Rik Brydson
Published in association with the Royal
Microscopical Society
Series Editor: Susan Brooks
A John Wiley & Sons, Ltd., Publication
Thiseditionfirstpublished2011
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LibraryofCongressCataloging-in-PublicationData
Aberration-correctedanalyticaltransmissionelectronmicroscopy/editedbyRikBrydson...[etal.].
p.cm.
Includesbibliographicalreferencesandindex.
ISBN978-0-470-51851-9(hardback)
1.Transmissionelectronmicroscopy.2.Aberration.3.Achromatism.I.Brydson,Rik.
QH212.T7A242011
(cid:2)
502.825–dc23
2011019731
AcataloguerecordforthisbookisavailablefromtheBritishLibrary.
PrintISBN:978-0470-518519(H/B)
ePDFISBN978-1119-978855
oBookISBN:978-111-9978848
ePubISBN:978-1119-979906
MobiISBN:978-1119-979913
Setin10.5/13ptSabonbyLaserwordsPrivateLimited,Chennai,India
Contents
ListofContributors xi
Preface xiii
1 GeneralIntroductiontoTransmissionElectronMicroscopy
(TEM) 1
PeterGoodhew
1.1 WhatTEMOffers 1
1.2 ElectronScattering 3
1.2.1 ElasticScattering 7
1.2.2 Inelastic Scattering 8
1.3 SignalswhichcouldbeCollected 10
1.4 ImageComputing 12
1.4.1 ImageProcessing 12
1.4.2 ImageSimulation 13
1.5 RequirementsofaSpecimen 14
1.6 STEMVersusCTEM 17
1.7 TwoDimensionalandThreeDimensionalInformation 17
2 IntroductiontoElectronOptics 21
GordonTatlock
2.1 RevisionofMicroscopywithVisibleLightandElectrons 21
2.2 FresnelandFraunhoferDiffraction 22
2.3 ImageResolution 23
2.4 ElectronLenses 25
2.4.1 Electron Trajectories 26
2.4.2 Aberrations 27
2.5 ElectronSources 30
2.6 ProbeFormingOptics andApertures 32
2.7 SEM,TEMandSTEM 33
vi CONTENTS
3 DevelopmentofSTEM 39
L.M.Brown
3.1 Introduction:StructuralandAnalyticalInformationin
ElectronMicroscopy 39
3.2 TheCreweRevolution:HowSTEMSolves the
InformationProblem 41
3.3 ElectronOpticalSimplicity ofSTEM 42
3.4 TheSignalFreedomofSTEM 45
3.4.1 Bright-Field Detector (PhaseContrast,
Diffraction Contrast) 45
3.4.2 ADF,HAADF 45
3.4.3 Nanodiffraction 46
3.4.4 EELS 47
3.4.5 EDX 47
3.4.6 OtherTechniques 48
3.5 BeamDamageandBeamWriting 48
3.6 CorrectionofSpherical Aberration 49
3.7 WhatdoestheFutureHold? 51
4 LensAberrations:DiagnosisandCorrection 55
AndrewBleloch andQuentinRamasse
4.1 Introduction 55
4.2 GeometricLensAberrations
andTheirClassification 59
4.3 SphericalAberration-Correctors 66
4.3.1 Quadrupole-Octupole Corrector 69
4.3.2 Hexapole Corrector 70
4.3.3 ParasiticAberrations 72
4.4 GettingAroundChromaticAberrations 74
4.5 DiagnosingLensAberrations 75
4.5.1 Image-based Methods 77
4.5.2 Ronchigram-based Methods 80
4.5.3 Precision Needed 85
4.6 FifthOrderAberration-Correction 85
4.7 Conclusions 86
5 TheoryandSimulations ofSTEMImaging 89
PeterD.Nellist
5.1 Introduction 89
5.2 Z-ContrastImagingofSingleAtoms 90
CONTENTS vii
5.3 STEMImagingOfCrystalline Materials 92
5.3.1 Bright-field ImagingandPhaseContrast 93
5.3.2 AnnularDark-fieldImaging 96
5.4 IncoherentImagingwithDynamicalScattering 101
5.5 ThermalDiffuseScattering 103
5.5.1 ApproximationsforPhononScattering 104
5.6 MethodsofSimulation forADFImaging 106
5.6.1 AbsorptivePotentials 106
5.6.2 Frozen PhononApproach 107
5.7 Conclusions 108
6 Details ofSTEM 111
AlanCraven
6.1 SignaltoNoiseRatioandSomeofitsImplications 112
6.2 TheRelationshipsBetweenProbeSize,
ProbeCurrentandProbeAngle 113
6.2.1 TheGeometricModelRevisited 113
6.2.2 TheMinimumProbeSize,theOptimum
AngleandtheProbeCurrent 115
6.2.3 TheProbeCurrent 115
6.2.4 ASimpleApproximationtoWaveOptical
ProbeSize 117
6.2.5 TheEffectofChromaticAberration 117
6.2.6 Choosingα inPractice 118
opt
6.2.7 TheEffectofMakingaSmallError
intheChoiceofα 119
opt
6.2.8 TheEffectofα OntheDiffraction Pattern 120
6.2.9 ProbeSpreadingandDepthofField 122
6.3 TheCondenserSystem 124
6.4 TheScanningSystem 126
6.4.1 Principles oftheScanningSystem 126
6.4.2 Implementation oftheScanningSystem 128
6.4.3 Deviations oftheScanningSystemFromIdeality 128
6.4.4 TheRelationship BetweenPixelSize
andProbeSize 130
6.4.5 Drift,DriftCorrectionandSmartAcquisition 131
6.5 TheSpecimen Stage 133
6.6 Post-Specimen Optics 135
6.7 BeamBlanking 136
6.8 Detectors 137
6.8.1 BasicPropertiesofaDetector 137
viii CONTENTS
6.8.2 Single andArrayDetectors 139
6.8.3 Scintillator/Photomultiplier Detector 139
6.8.4 Semiconductor Detectors 141
6.8.5 CCDCameras 142
6.9 ImagingUsingTransmittedElectrons 145
6.9.1 TheDiffraction Pattern 145
6.9.2 CoherentEffectsintheDiffractionPattern 147
6.9.3 SmallAngularRange – BrightField andTilted
DarkFieldImages 152
6.9.4 MediumAngularRange – MAADF 152
6.9.5 High AngularRange – HAADF 153
6.9.6 ConfiguredDetectors 153
6.10SignalAcquisition 154
Acknowledgements 159
7 ElectronEnergyLossSpectrometryandEnergy
DispersiveX-rayAnalysis 163
RikBrydsonandNicoleHondow
7.1 WhatisEELSandEDX? 164
7.1.1 BasicsofEDX 164
7.1.2 BasicsofEELS 166
7.1.3 CommonFeaturesForAnalytical
Spectrometries 168
7.2 AnalyticalSpectrometries intheEnvironmentofthe
ElectronMicroscope 170
7.2.1 InstrumentationforEDX 170
7.2.2 EELSInstrumentation 174
7.2.3 MicroscopeInstrumentationforAnalytical
Spectroscopies 178
7.3 ElementalAnalysisandQuantification UsingEDX 182
7.4 LowLossEELS – Plasmons,IBTransitions
andBandGaps 187
7.5 CoreLossEELS 191
7.5.1 ElementalQuantification 191
7.5.2 Near-EdgeFineStructureForChemical and
BondingAnalysis 195
7.5.3 Extended-EdgeFineStructureForBonding
Analysis 200
7.6 EDXandEELSSpectralModelling 201
7.6.1 TotalSpectrumModelling 201
CONTENTS ix
7.6.2 EELSModellingofNearEdgeStructuresand
alsotheLowLoss 201
7.7 SpectrumImaging:EDXandEELS 202
7.8 UltimateSpatialResolutionofEELS 206
7.9 Conclusion 207
8 Applications ofAberration-CorrectedScanning
TransmissionElectronMicroscopy 211
MervynD.Shannon
8.1 Introduction 211
8.2 SampleCondition 212
8.3 HAADFImaging 213
8.3.1 ImagingofIsolatedAtoms 213
8.3.2 LineDefects (1-D) 219
8.3.3 Interfaces andExtendedDefects(2-D) 220
8.3.4 Detailed ParticleStructures(3-D) 226
8.3.5 Low-lossEELS 230
8.3.6 Core-lossEELSandAtomic-scale
Spectroscopic Imaging 231
8.4 Conclusions 236
9 Aberration-Corrected ImaginginCTEM 241
SarahJ.HaighandAngusI.Kirkland
9.1 Introduction 241
9.2 OpticsandInstrumentationforAberration-
CorrectedCTEM 243
9.2.1 Aberration-Correctors 243
9.2.2 Related InstrumentalDevelopments 243
9.3 CTEMImagingTheory 244
9.3.1 CTEMImageFormation 244
9.3.2 TheWaveAberrationFunction 246
9.3.3 PartialCoherence 252
9.4 CorrectedImagingConditions 253
9.4.1 TheUseofNegative SphericalAberration 254
9.4.2 AmplitudeContrastImaging 256
9.5 AberrationMeasurement 256
9.5.1 AberrationMeasurementFromImageShifts 256
9.5.2 AberrationMeasurementfrom
Diffractograms 257
x CONTENTS
9.5.3 AnAlternativeApproachtoAberration
Measurement 258
9.6 IndirectAberrationCompensation 258
9.7 AdvantagesofAberration-Correction forCTEM 259
9.8 Conclusions 259
Acknowledgements 260
AppendixA: AberrationNotation 263
AppendixB: GeneralNotation 267
Index 275