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ENGINEERING
Fundamentals
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Bundle — the more Transmission electron microscope (TEM) is a very powerful
books you buy, tool for characterizing various types of materials. Using a
the higher your light microscope, the imaging resolution is at several hundred
nanometers, and for a scanning electron microscope at several A A Practical Guide
discount!
nanometers. The imaging resolution of the TEM, however, can P
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routinely reach several angstroms on a modem instrument. a
THE CONTENT c
In addition, the TEM can also provide material structural t to Transmission
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Engineering specimens, and chemical compositional information due to the l
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strong electron specimen atom interactions.
• Mechanical u
& Chemical This book provides a concise practical guide to the TEM id Electron Microscopy
user, starting from the beginner level, including upper-division e
Engineering
undergraduates, graduates, researchers, and engineers, on how t
• Materials Science o
to learn TEM effi ciently in a short period of time. It covers most
& Engineering of the areas using TEM, including the instrumentation, sample Tr Fundamentals
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• Civil & preparation, diffraction, imaging, analytical microscopy, and n
Environmental some newly developed advanced microscopy techniques. This sm
Engineering book may serve as a textbook for a TEM course or workshop, or i
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• Electrical a reference book for the TEM user to improve their TEM skills. s
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Engineering n
Dr. Zhiping Luo is an associate professor in the department
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of chemistry and physics at Fayetteville State University, North l
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Carolina. He started electron microscopy in early 1990s. c
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a one time fee containing magnesium alloys, he encountered with fi ne complex n
• No subscriptions or intermetallic phases, so he used TEM as a major research M
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microscopy with Professor H. Hashimoto. In 1998, he moved s
concurrent usage c
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a visiting scholar and became the assistant scientist in 2001.
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Between 2001 and 2012, he worked as a TEM instrumental
scientist at the Microscopy and Imaging Center at Texas A&M Zhiping Luo
For further information, University, where he taught TEM courses and trained many TEM
a free trial, or to order, users. Dr. Luo has authored over 200 articles in peer-reviewed
contact: journals, and most of them involved TEM investigations.
[email protected]
A Practical Guide to
Transmission Electron
Microscopy
A Practical Guide to
Transmission Electron
Microscopy
Fundamentals
Zhiping Luo
A Practical Guide to Transmission Electron Microscopy: Fundamentals
Copyright © Momentum Press®, LLC, 2016
All rights reserved. No part of this publication may be reproduced, stored
in a retrieval system, or transmitted in any form or by any means—
electronic, mechanical, photocopy, recording, or any other except for brief
quotations, not to exceed 250 words, without the prior permission of the
publisher.
First published in 2016 by
Momentum Press, LLC 222
East 46th Street, New York, NY 10017
www.momentumpress.net
ISBN-13: 978-1-60650-703-2 (paperback)
ISBN-13: 978-1-60650-704-9 (e-book)
Momentum Press Materials Characterization and Analysis Collection
DOI: 10.5643/9781606507049
Collection ISSN: 2377-4347 (print)
Collection ISSN: 2377-4355 (electronic)
Cover and interior design by S4Carlisle Publishing Services
Private Ltd., Chennai, India
First edition: 2016
10 9 8 7 6 5 4 3 2 1
Printed in the United States of America.
Dedicated to
My dear parents, who taught
me the diligence—no matter
what kind of job it is.
Abstract
Transmission electron microscope (TEM) is a very powerful tool for
characterizing various types of materials. Using a light microscope, the
imaging resolution is at several hundred nanometers, and for a scanning
electron microscope, SEM, at several nanometers. The imaging resolu-
tion of the TEM, however, can routinely reach several angstroms on a
modem instrument. In addition, the TEM can also provide material
structural information, since the electrons penetrate through the thin
specimens, and chemical compositional information due to the strong
electron–specimen atom interactions. Nowadays, TEM is widely applied
in diverse areas in both physical sciences (chemistry, engineering, geosci-
ences, materials science, and physics) and life sciences (agriculture, biol-
ogy, and medicine), playing a key role in research or development for
material design, synthesis, processing, or performance.
This book provides a concise practical guide to the TEM user, starting
from the beginner level, including upper-division undergraduates, gradu-
ates, researchers, and engineers, on how to learn TEM efficiently in a short
period of time. It is written primarily for materials science and engineering
or related disciplines, while some applications in life sciences are also in-
cluded. It covers most of the areas using TEM, including the instrumenta-
tion, sample preparation, diffraction, imaging, analytical microscopy, and
some newly developed advanced microscopy techniques. In each topic, a
theoretical background is firstly briefly outlined, followed with step-by-step
instructions in experimental operation or computation. Some technical tips
are given in order to obtain the best results. The practical procedures to
acquire, analyze, and interpret the TEM data are therefore provided. This
book may serve as a textbook for a TEM course or workshop, or a refer-
ence book for the TEM user to improve their TEM skills.
Keywords
Analytical Electron Microscopy; Ceramics; Chemical Analysis; Chemis-
try; Composites; Crystallography; Electron Diffraction; Electron Energy-
Loss Spectroscopy (EELS); Forensic Science; Geosciences; Imaging;
Industry; Life Sciences; Materials Science and Engineering; Metals and
viii KEYWORDS
Alloys; Microstructure; Nanomaterials; Nanoscience; Nanotechnology;
Physics; Scanning Transmission Electron Microscopy (STEM); Polymer;
Structure; Transmission Electron Microscopy (TEM); X-ray Energy-
Dispersive Spectroscopy (EDS).
Contents
Preface .............................................................................................. xiii
Acknowledgments ................................................................................. xv
About the Book .................................................................................. xvii
Personnel Experiences with TEM ......................................................... xix
Chapter 1 Introduction ..................................................................... 1
1.1 Microscope Resolution ............................................... 2
1.2 Interactions of Electrons with Specimen ..................... 4
1.3 Comparison of TEM with Other Microscopy
Techniques ................................................................ 6
References ...................................................................... 11
Chapter 2 Sample Preparation ......................................................... 13
2.1 Material Samples ...................................................... 14
2.1.1 TEM Grids .................................................... 15
2.1.2 Ion Milling ..................................................... 20
2.1.3 Electropolishing .............................................. 26
2.1.4 Focused Ion Beam .......................................... 30
2.1.5 Microtomy ..................................................... 31
2.2 Biological Samples .................................................... 36
2.2.1 Particulate Samples ......................................... 37
2.2.2 Cells and Tissue Samples ................................ 39
References ...................................................................... 42
Chapter 3 Instrumentation and Operation ...................................... 45
3.1 Construction ............................................................ 45
3.1.1 Electron Gun .................................................. 45
3.1.2 Electromagnetic Lens ...................................... 49
3.1.3 Condenser Lenses and Condenser
Apertures ....................................................... 52
3.1.4 Objective Lens and Objective Aperture ........... 55
3.1.5 Intermediate Lens and Diffraction
Aperture......................................................... 57
