A Practical Guide to Surface Metrology

247 Pages·2019·12.633 MB·English

by  Michael Quinten

Springer Series in Measurement Science and Technology
Michael Quinten
A Practical
Guide to
Surface
Metrology
Springer Series in Measurement Science
and Technology
SeriesEditors
MarkysG.Cain,ElectrosciencesLtd.,Farnham,Surrey,UK
Giovanni Battista Rossi, DIMEC Laboratorio di Misure, Universita degli Studi di
Genova,Genova,Genova,Italy
JiríTesař,CzechMetrologyInstitute,Prague,CzechRepublic
MarijnvanVeghel,VSLDutchMetrologyInstitute,DELFT,Zuid-Holland,
TheNetherlands
Kyung-Young Jhang, School of Mechanical Engineering, Hanyang University,
Seoul,Korea(Republicof)
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Moreinformationaboutthisseriesathttp://www.springer.com/series/13337
Michael Quinten
A Practical Guide to Surface
Metrology
MichaelQuinten
Aldenhoven,Germany
ISSN2198-7807 ISSN2198-7815 (electronic)
SpringerSeriesinMeasurementScienceandTechnology
ISBN978-3-030-29453-3 ISBN978-3-030-29454-0 (eBook)
https://doi.org/10.1007/978-3-030-29454-0
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To my family
Preface
Youmustmeasurethethingsthataremeasurable,andmakemeasurablethethingsthatare
not.
GalileoGalilei(1564–1642)
New and improved materials, better machines, and phenomenal progress in
manufacturing contribute to technological challenges of today for inspection
methods and techniques. In the production of mechanical, electronic, or optical
microcomponents, the dimensions are even continuously scaling down, while the
surface structures increasingly become more complex. In consequence, develop-
ment, process control, and quality control must be carried out on these size scales
withsophisticatedmeasuringdevices.
Only with metrology we are able to check our manufacturing, to describe our
product, to establish models for our planning, and to validate the models. The
corresponding applied metrology tools must then meet the specific requirements.
Hence, to keep pace with the demands from industry for greater accuracy, repeat-
ability, reliability, ease of use, and continuous process control, new and improved
measuringtechniquesweredeveloped.
The purpose of this book is to introduce the commonly used measuring tech-
niques oftoday. Indoing so,thebookdeals with many,althoughbynomeans all,
methodsofsurfacemetrology.Someofthemalreadyhavealongtraditionbuthave
experienced big progress not only with the progress in the computer capabilities
required to handle large amounts of data but also with the development of intense
lightsourcesandmoresensitivedetectors.Thebiggestpartofmeasuringmethodsis
related with optical methods and imaging, especially those which are basing on
interferometry.Butalsotactile,capacitive,andinductivemethodsareconsidered.
Thereareotherbooksondimensionalmetrologythatcovermanyofthemethods
presented in this book. While Optical Shop Testing (2007) edited by Daniel
Malacara concentrates on almost all optical methods for examination of optical
elements and their surface, the book Optical Measurement of Surface Topography
(2011)editedbyRichardLeachgivesacomprehensiveoverviewonopticalmethods
for dimensional surface topography measurement at that time. The Handbook of
vii
viii Preface
Optical Metrology: Principles and Applications edited by Tōru Yoshizawa and
revised in 2015 is quite similar to the book of Richard Leach, with contributions
of other experts in the field. The book Characterisation of Areal Surface Texture
(2013)editedbyRichardLeachconcentratesoncharacterizationtechniquespartic-
ularlyforarealsurfacetexture.
Books that emphasize more the scientific aspects of surfaces and interfaces and
the corresponding measuring methods are also available. Surface Science Tech-
niques (2013) edited by Gianangelo Bracco and Bodil Holst describes the experi-
mentaltechniquesemployedtostudysurfacesandinterfacesinwhichtheemphasis
is laid on methods and techniques used in surface science. Surface and Interface
Science(2012) withsixvolumes editedbyKlausWandeltcovers interface science
fromanewsurfacescienceperspectiveandisarathergoodreferenceforscientific
peoplebutlessforpractitioners.
To write this book finally required reading and valuating many monographs as
such mentioned above and a still larger number of publications related to dimen-
sional surface metrology. The total amount of published work is, however, too
immensetoconsideritall.Therefore,Ihopetohaveincludedthemostrelevantup
todateandapologizeforallthecontributionsnotconsideredhere.
Asthebookprovidesaccesstomanyprinciplesandpracticesofmoderndimen-
sional measurement on surfaces, I hope that this book will prove of value to
developers and practitioners in the field of dimensional surface metrology. Never-
theless, also graduated students and lecturers may benefit from the information
containedinthisbookonthevariousmeasuringtechniques.
In the end, I want to express my thanks to some people. First of all, many
reputablemanufacturersofmeasuringinstrumentswerehelpfulinsupplyingphoto-
graphic material and measurement results for illustrating. Many thanks for their
cooperation!IalsowouldliketoacknowledgethecontinuingsupportofTomSpicer
and Hisako Niko from Springer Nature. They were the “helping hand” in all
questions concerning publishing this book. Last but not least, I want to thank my
familyforthesupportandpatiencewithmeduringwritingthisbook.
Aldenhoven,Germany MichaelQuinten
June1,2019
Contents
1 IntroductiontoSurfacesandSurfaceMetrology. . . . . . . . . . . . . . . . 1
1.1 MicroscopicViewonaSurface. . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 MacroscopicViewonaSurface. . . . . . . . . . . . . . . . . . . . . . . . . 5
1.3 MeasurementandValidation. . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3.1 ProfileMeasurement. . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.3.2 ArealMeasurement. . . . . . . . . . . . . . . . . . . . . . . . . . . 27
1.3.3 MeasurementModules. . . . . . . . . . . . . . . . . . . . . . . . . 31
1.3.4 TheWaytoReliableSurfaceData. . . . . . . . . . . . . . . . . 39
References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
2 TactileSurfaceMetrology. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
2.1 TactileSurfaceProfiling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
2.2 AtomicForceMicroscopy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
3 CapacitiveandInductiveSurfaceMetrology. . . . . . . . . . . . . . . . . . . 57
3.1 CapacitiveSurfaceProfiling. . . . . . . . . . . . . . . . . . . . . . . . . . . 57
3.2 SurfaceProfilingwithEddyCurrents. . . . . . . . . . . . . . . . . . . . . 62
References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
4 OpticalSurfaceMetrology–PhysicalBasics. . . . . . . . . . . . . . . . . . . 67
4.1 ElectromagneticWaves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
4.2 Huygens-FresnelPrincipleofWavePropagation. . . . . . . . . . . . . 70
4.3 Polarization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
4.4 Interference. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
4.5 Coherence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
4.6 DielectricFunctionandRefractiveIndex. . . . . . . . . . . . . . . . . . 75
4.7 ReflectionandRefraction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
4.8 DispersionEffects. . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . 84
ix
x Contents
4.9 Diffraction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
4.10 Scattering. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
5 OpticalSurfaceMetrology:Methods. . . . . . . . . . .. . . . . . . . . . . .. . 95
5.1 ChromaticConfocalSurfaceProfiling. . . . . . . . . . . . . . . . . . . . 95
5.2 SurfaceProfilingwithanAutofocusSensor. . . . . . . . . . . . . . . . 102
5.3 LightSectionalMethods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
5.3.1 LaserPointTriangulator. . . . . . . . . . . . . . . . . . . . . . . . 104
5.3.2 LineProjection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
5.3.3 FringeProjection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
5.4 MicroscopyMethods.. . . .. . . .. . . .. . . .. . . .. . .. . . .. . . .. 108
5.4.1 ClassicalMicroscopy. . . . . . . . . . . . . . . . . . . . . . . . . . 109
5.4.2 ConfocalMicroscopy. . . . . . . . . . . . . . . . . . . . . . . . . . 115
5.4.3 FocalDepthVariation. . . . . . . . . . . . . . . . . . . . . . . . . 124
5.4.4 ScanningNear-FieldOpticalMicroscopy. . . . . . . . . . . . 127
5.5 InterferometricMethods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
5.5.1 InterferometricFormInspection. . . . . . . . . . . . . . . . . . 132
5.5.2 TiltedWaveInterferometry. . . . . . . . . . . . . . . . . . . . . . 134
5.5.3 WhiteLightInterferometry. . . . . . . . . . . . . . . . . . . . . . 136
5.5.4 WavelengthScanningInterferometry. . . . . . . . . . . . . . . 145
5.5.5 Multi-WavelengthInterferometry. . . . . . . . . . . . . . . . . 147
5.5.6 GrazingIncidenceInterferometry. . . . . . . . . . . . . . . . . 150
5.5.7 FrequencyScanningInterferometry. . . . . . . . . . . . . . . . 153
5.5.8 DigitalHolographicMicroscopy. . . . . . . . . . . . . . . . . . 155
5.5.9 Conoscopy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159
5.6 WaveFrontSensing(Shack-Hartmann). . . . . . . . . . . . . . . . . . . 160
5.7 Deflectometry. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163
5.8 MakyohTopographySensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 165
5.9 SurfaceProfilingUsingElasticLightScattering. . . . . . . . . . . . . 167
5.9.1 TotalIntegratedScattering(TIS). . . . . . . . . . . . . . . . . . 168
5.9.2 AngularResolvedScattering(ARS). . . . . . . . . . . . . . . 169
5.9.3 SpeckleBasedRoughnessDetermination. . . . . . . . . . . . 173
5.10 SpectralAnalysisandCharacterization. . . . . . . . . . . . . . . . . . . . 176
5.10.1 Reflectometry. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177
5.10.2 SpectroscopicEllipsometry. . . . . . . . . . . . . . . . . . . . . . 188
References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190
6 ImagingMethods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
6.1 IndustrialImageProcessing. . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
6.1.1 Illumination. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
6.1.2 Camera. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
6.1.3 ImageProcessingHardware. . . . . . . . . . . . . . . . . . . . . 202
6.1.4 DigitalImageProcessingSoftware. . . . . . . . . . . . . . . . 202
6.1.5 Mechanics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203