Simulations as a tool in semiconductor metrology

45 Pages·2014·3.48 MB·English

by  Adel, Mike

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Who gets the highest salary?
1. Semiconductor device engineer
2. Algorithm engineer
3. Optical design engineer
4. Mechanical engineer
5. None of the above - Powerpoint engineer
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Your host today:
 Mike Adel
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Agenda
 A few industry semilog plots
 Computational lithography
 Example 1 - OPC
 Example 2 - SMO
 Computational metrology
 Simulation of the interaction of light with periodic structures
 Example 1 – OCD (drill down!)
 Optical overlay metrology

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What is a TLA?
 Hint 1 - it is autological.
 Hint 2 - previous slide contained four.

 Three Letter Acronym
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The Semiconductor Market
Era of the Consumer
Semiconductor Demand by Segment Faster, Smaller, Cheaper
100%
90%
80%
70%
60%
50%
40%
30%
20%
10%
0%

0 5 0 5 0 5 0 5 0 5 0
6 6 7 7 8 8 9 9 0 0 1
9 9 9 9 9 9 9 9 0 0 0
1 1 1 1 1 1 1 1 2 2 2
Govt. Corporate Consumer
Source: Semiconductor Industry Association
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semiconductor semilog plots
Days to 10 million sold
era of the corporation… …era of the consumer
100000
10000

d
l
o
s

n
o 1000
i
l
l
i
m

0
1
100

o
t

s
y
a
d 10
1
1970 1980 1990 2000 2010 2020
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The dollars are also on a semilog plot
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