Particles on surfaces 4 : detection, adhesion, and removal

719 Pages·1995·12.4 MB·English

by  K. L. Mittal

Cover

Particles On Surfaces : Detection, Adhesion,
title:
and Removal
author: Mittal, K. L.
publisher: CRC Press
isbn10 | asin: 0824795350
print isbn13: 9780824795351
ebook isbn13: 9780585381565
language: English
Particles--Congresses, Surfaces
subject
(Technology)--Congresses.
publication date: 1995
lcc: TA418.78.S96 1992eb
ddc: 620.43
Particles--Congresses, Surfaces
subject:
(Technology)--Congresses.
Page a
PARTICLES
ON
SURFACES
Page b
This page intentionally left blank.
Page i
PARTICLES
ON
SURFACES
Detection, Adhesion, and Removal
edited by
K. L. Mittal
Skill Dynamics, an IBM Company
Thornwood, New York
Page ii
ISBN: 0-8247-9535-0
The publisher offers discounts on this book when ordered in bulk
quantities. For more information, write to Special Sales/Professional
Marketing at the address below.
This book is printed on acid-free paper.
Copyright © 1995 by Marcel Dekker, Inc. All Rights Reserved.
Neither this book nor any part may be reproduced or transmitted in any
form or by any means, electronic or mechanical, including photocopying,
microfilming, and recording, or by any information storage and retrieval
system, without permission in writing from the publisher.
Marcel Dekker, Inc.
270 Madison Avenue, New York, New York 10016
Current printing (last digit):
10 9 8 7 6 5 4 3 2 1
PRINTED IN THE UNITED STATES OF AMERICA
Page iii
Preface
This volume embodies the proceedings of the Fourth Symposium on
Particles on Surfaces: Detection, Adhesion and Removal held as a part
of the 23rd Annual meeting of the Fine Particle Society in Las Vegas,
Nevada, July 13–17, 1992. The previous three symposia in this biennial
series of events were held in 1986, 1988, and 1990 and the proceedings
of which have been documented.1–3
As pointed out in the prefaces to the earlier volumes1–3 on this topic, the
subject of particle detection, adhesion and removal is of great importance
in many technologies, and there has been an intensified effort in
ameliorating the existing ones and/or in devising new ways to remove
particles from a host of substrates. The objectives of this symposium
were analogous to those of earlier events, and our intent here was to
provide an update on the research and development activities in the
domain of particles on surfaces. The program consisted of 39 invited and
contributed papers and many ramifications of particles on surfaces were
discussed. During the symposium, there were brisk discussions (both
formally and informally).
This volume contains a total of 23 papers. The topics covered include:
adhesion induced deformations of particles on surfaces; the use of
atomic force microscopy in probing particle–particle adhesion; particle
contamination in microelectronics, on spacecraft, and on optical surfaces;
the role of air ionization in reducing surface contamination by particles in
the cleanroom; abrasive blasting media for contamination-free deburring
process; particle generation and control in tubing and piping connection
design; various methods (light scattering, spectroscopic, x-ray
fluorescence, etc.) for
Page iv
detection, identification, analysis, and characterization of particles on
silicon and other surfaces; the use of focused acoustic waves to
interrogate the behavior of particles on surfaces; various ways
(sonication, spray impingement, liquid jets, fluorocarbon surfactant
solutions, and laser cleaning) to remove particles from a variety of
surfaces.
The papers included in this book were thoroughly subjected to rigorous
peer review, and all were revised (some quite considerably) before
inclusion in this book. Thus, this book is not a mere collection of
unreviewed papers but represents information that has passed peer
scrutiny.
This and the earlier three volumes offer a fountain of information
concerning particles on surfaces and I sincerely hope that anyone with
serious or even tangential interest in this topic will find this volume useful.
Now comes the pleasant task of thanking those who helped in one way
or another. First, I am thankful to the Fine Particle Society for sponsoring
this event. Thanks are also due to the appropriate management of Skill
Dynamics, an IBM Company, for allowing me to organize the symposium
and edit this volume. My special appreciation goes to my wife, Usha, for
assuming the role of “secretary” and carrying out, without complaint, the
various chores involved. I would be remiss if I failed to acknowledge the
time, efforts, and valuable comments of the reviewers. Of course, without
the contribution, sustained interest, and enthusiasm of the authors, this
book could not have been born.
K. L. Mittal
REFERENCES
1. K. L. Mittal (ed.), Particles on Surfaces 1: Detection, Adhesion and
Removal, Plenum Press, New York (1988).
2. K. L. Mittal (ed.), Particles on Surfaces 2: Detection, Adhesion and
Removal, Plenum Press, New York (1989).
3. K. L. Mittal (ed.), Particles on Surfaces 3: Detection, Adhesion and
Removal, Plenum Press, New York (1991).
Page v
Contents
Preface iii
Particles on Surfaces: Adhesion Induced Deformations 1
D. S. Rimai, L. P. DeMejo, R. Bowen, and J. D. Morris
Surface Force Tensile Interactions Between Micrometer Size Particles
and a Polyester-PDMS Block Copolymer Substrate 33
L. P. DeMejo, D. S. Rimai, J. H. Chen, and R. Bowen
Polymer to Particle Adhesion Probed with Atomic Force
Microscopy 47
H. Mizes, K.-G. Loh, M. L. Ott, and R. J. D. Miller
Surface Particle Contamination Identification in Microelectronics 61
M. Simard-Normandin
An Overview of Spacecraft Particulate Contamination Phenomena 77
M. C. Fong, A. L. Lee, and P. T. Ma
Contamination on Optical Surfaces – Concerns, Prevention, Detection,
and Removal 101
J. M. Bennett
An Advanced Surface Particle and Molecular Contaminant
Identification, Removal, and Collection System 111
S. P. Hotaling and D. A. Dykeman
Page vi
The Role of Air Ionization in Reducing Surface Contamination by
Particles in the Cleanroom 141
S. Gehlke and A. J. Steinman
Selecting a Contamination-Free Deburring Process: Testing Abrasive
Blasting Media 151
W. L. Prater, G. J. Stone, and G. J. Chung
Particle Generation and Control in Tubing and Piping Connection
Design 189
M. Alberg
Detection and Identification of Particles on Silicon Surfaces 201
T. Hattori
The Characterization of Particles on Spacecraft Returned from
Orbit 219
E. R. Crutcher
A Light-Scattering Method for Determining the Composition of Particles
on Surfaces 253
L. D. Lamb, J. D. Lorentzen, And D. R. Huffman
Light Scattering by Spherical Particles on Planar Multi-Layered
Substrates 265
A. Cangellaris and F. I. Assi
New Test Procedure for the Examination of the Particulate Cleanliness
of Technical Surfaces 289
H.-J. Warnecke and B. Klumpp
Discrimination Between Particulate and Film Type Contamination on
Surfaces by Means of Total Reflection X-Ray Fluorescence
Spectrometry 311
H. Schwenke and J. Knoth
Particle Characterization on Surfaces by Auger Electron