Table Of ContentDavid J. Larson · Ty J. Prosa
Robert M. Ulfi g · Brian P. Geiser
Thomas F. Kelly
Local Electrode
Atom Probe
Tomography
A User‘s Guide
Foreword by
Professor Sir Colin J. Humphreys
Local Electrode Atom Probe Tomography
David J. Larson (cid:129) Ty J. Prosa (cid:129) Robert M. Ulfig
Brian P. Geiser (cid:129) Thomas F. Kelly
Local Electrode Atom
Probe Tomography
A User’s Guide
Foreword by
Professor Sir Colin J. Humphreys, CBE, FRS, FREng.
DavidJ.Larson TyJ.Prosa
CAMECAInstruments,Inc. CAMECAInstruments,Inc.
Madison,WI,USA Madison,WI,USA
RobertM.Ulfig BrianP.Geiser
CAMECAInstruments,Inc. CAMECAInstruments,Inc.
Madison,WI,USA Madison,WI,USA
ThomasF.Kelly
CAMECAInstruments,Inc.
Madison,WI,USA
ISBN978-1-4614-8720-3 ISBN978-1-4614-8721-0(eBook)
DOI10.1007/978-1-4614-8721-0
SpringerNewYorkHeidelbergDordrechtLondon
LibraryofCongressControlNumber:2013953879
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Preface
Overtheyearsanumberofatomprobebookshavebeenwrittenbyvariousauthors
[1–10],sowhywriteanotheroneyoumightask.Webelievethatthisbookisunique
in specifically targeting atom probe adopters who are new to the technique. The
bookintroducesnewuserstotheprocessofperformingalloftheaspectsofaLocal
Electrode Atom Probe™ experiment. It includes the fundamentals of preparing
specimensforthemicroscopefromavarietyofmaterials,detailsoftheinstrumen-
tation used in data collection, parameters under which optimal data are collected,
current methods of data reconstruction, and selected methods of data analysis. In
addition, certain topics are explained specifically from a user perspective and
include details that are often learned only through trial and error, allowing users
tosucceedmorequicklyinthechallengingareasofspecimenpreparationanddata
collection.
Thisbookismeanttobeausefulreferenceforthe“conventionalwisdom”type
of information that is not always found in academic books and is usually gained
onlythroughexperience.Itisnotmeanttobeacomprehensive treatmentofatom
probetomographybutratheraneverydayreferencefordatacollectiononthelocal
electrode atom probe and for the specimen preparation and data analysis that go
alongwithsuchexperiments.Forthemostpart,wehavedealtwithmoreadvanced
topics,such asthedetailsofthespatialreconstructionequations,byincludingthe
information in appendices or by simply referring the reader to other textbooks or
journalarticles.Inthiswaywehopetohaveproducedaveryusablereferencefor
bothnoviceusersandexperiencedscientists.Thefutureofatomprobetomography
isbright,andwehopethatthepathtoadoptionwillbeclearerwiththeavailability
ofthisbook.
Madison,WI,USA DavidJ.Larson
TyJ.Prosa
RobertM.Ulfig
BrianP.Geiser
ThomasF.Kelly
v
vi Preface
References
1. Mu¨ller, E.W., Tsong, T.T.: Field Ion Microscopy Principles and Applications. Elsevier,
NewYork(1969)
2. Hren,J.J.,Ranganathan,S.(eds.):Field-IonMicroscopy.PlenumPress,NewYork(1968)
3. Bowkett,K.M.,Smith,D.A.:Field-IonMicroscopy.North-Holland,Amsterdam(1970)
4. Muller,E.W.,Tsong,T.T.:FieldIonMicroscopy,FieldIonizationandFieldEvaporation,vol.
4.ProgressinSurfaceScience(1973)
5. Miller, M.K., Smith, G.D.W.: Atom Probe Microanalysis: Principles and Applications to
MaterialsProblems.MaterialsResearchSociety,Pittsburgh(1989)
6. Sakurai,T.,Sakai,A.,Pickering,H.W.:Atomprobefieldionmicroscopyanditsapplications.
Adv.Electron.Electron.Phys.20,1–299(1989)
7. Tsong, T.T.: Atom-Probe Field Ion Microscopy: Field Ion Emission and Surfaces and
Interfaces at Atomic Resolution. Cambridge University Press, Cambridge, Great Britain
(1990)
8. Miller,M.K.,Cerezo,A.,Hetherington,M.G.,Smith,G.D.W.:AtomProbeFieldIonMicros-
copy.OxfordUniversityPress,Oxford(1996)
9. Miller,M.K.:AtomProbeTomography:AnalysisattheAtomicLevel.KluwerAcademic/
PlenumPublishers,NewYork(2000)
10. Gault,B.,Moody,M.P.,Cairney,J.M.,Ringer,S.P.:AtomProbeMicroscopy.SpringerSeries
inMaterialsScience,vol.160.Springer(2012)
Acknowledgment
1
NumerouspeoplehavecontributedtothedevelopmentandsuccessoftheLEAP
overtheyears.Wewouldcertainlyliketoincludeeveryonewhoparticipatedinthis
venture,butwearecertaintomissafewnames,andsoweapologizeinadvancefor
anyomissions.
We would like to start with a special acknowledgement to the family of Tom
Kelly—withouttheirencouragementandsupportovertheyears,thecurrentLEAP
would not exist. We would like to acknowledge all of the past employees of
CAMECA1 (formerly Imago™ Scientific Instruments) who played critical roles
inthedevelopmentoftheLEAP;mostnotablywewouldliketothankDr.TyeT.
Gribb for all of his contributions toward making the LEAP what it is today. We
would also like to thank all of the current employees of CAMECA with a special
acknowledgmenttotheengineeringteamforcreatingamarvelousinstrument:Joe
Bunton,DanLenz,JesseOlson,EdOltman,TimPayne,DanRauls,JeffShepard,
EricStrennen,MarkLamers,andDaveSund.
We would especially like to thank our colleagues who have assisted in the
preparationofthisbookbyreviewingindividualchapters.Professionalcolleagues
include Frederic Danoix, Baptiste Gault, Stephan Gerstl, Michael Miller, Sergej
Mutas, John Panitz, Danny Perea, Amanda Petford-Long, Krishna Rajan, C.J.
Humphreys,andDanSchreiber.WewillparticularlyliketothankRichardForbes
forassistancewithoneoftheappendices.Likewise,ourCAMECAcolleagueswho
have reviewed chapters include Peter Clifton, Devin Giddings, Daniel Lawrence,
DanLenz,MarkLevesque,DavidOlson,JesseOlson,EdOltman,DavidReinhard,
HuguesFrancoisSaintCyr,MichelSchumacher,EricStrennen,SavannaStrennen,
LudovicRenaud,andJohnWatson.
We would also like to thank the scientists and publishers who have granted us
permission to include portions of their work in this book: D. Abou-Ras,
H.O.Andre´n,O.H.Auciello,P.A.J.Bagot, J.Ballard,R. Banerjee,G.Brennecka,
R. Caballero, J. Cairney, A.J. Cavosie, A. Cerezo, V. Chitry, P.P. Choi,
O. Cojocaru-Mire´din, X.Y. Cui, T.L. Daulton, A.M. Davis, F. DeGeuser,
S.P. DenBaars, A. Deschamps, D.R. Diercks, D.M. Dimiduk, J.W. Elam,
P. Felfer, C. Floss, H.L. Fraser, B. Gault, M. Gilbert, H. Gnaser, L.M. Gordon,
vii
viii Acknowledgment
B.P. Gorman, T.T. Gribb, G.H. Gu, E.E. Haller, M. Hasegawa, P.R. Heck,
M.A. Hekmaty, A. Henjered, K. Henry, J. Hiller, A.C. Hillier, C. Hombourger,
Y.L. Hu, J.Y. Hwang, K. Inoue, D. Isheim, K.M. Itoh, D. Jager, M.J. Jercinovic,
D.Joester,A.K.Kambham,Y.Kawamura,K.F.Kelton,M.Kimoto,R.Kirchhofer,
S. Koelling, N. Kruse, L.J. Lauhon, W. Lefebvre, J.L. Lensch, J. Lewis, T. Li,
P. Liddicoat, L. Longstreth-Spoor, A. Mane, E.A. Marquis, I. Martin, S.J. May,
B. Mazumder, A.J. Melmed, T.P. Melo, M.K. Miller, J. Mody, M.P. Moody,
D. Moser, C.K.S. Moy, E.W. Mu¨ller, Y. Nagai, S. Nakamura, A. Nishida,
O. Nishikawa, H. Norde´n, J.A. Panitz, C.G. Park, M.J. Pellin, D.E. Perea,
T.C. Petersen, D. Raabe, J.N. Randall, G. Ranzi, R.F. Reidy, L. Renaud,
S.P. Ringer, M. Romanes, M.R. Savina, D.W. Saxey, D. Schreiber,
D.N. Seidman, Y. Shimizu, R. Shivaraman, C. Sigli, V.S. Smentkowski,
G.D.W. Smith, D. Snoeyenbos, J.S. Speck, R. Srinivasan, F.J. Stadermann,
E. Steel, T. Stephan, A. Strickland, G. Sundell, H. Takamizawa, M.C. Teague,
M. Thuvander, J. Tiley, T. Toyama, S.C.E. Tsang, T. Tsunomura, A. Tyagi,
M. Uematsu, T. Ushikubo, J.W. Valley, W. Vandervorst, F. Vurpillot,
G.B. Viswanathan, B.W. Wessels, S. Wilde, C.A. Williams, M.H. Wong,
R. Wuerz, Y. Xiang, F. Yano, Y. Zhang, and H. Zhong. We also thank the
companieswhogranteduspermissiontodisplayimages,graphs,orschematicsor
whoaidedinsomeimplementationofLEAPanalysis,includingEvansAnalytical
1
Group , Dune Sciences, Gatan, Fischione, Omniprobe, Hummingbird Scientific,
andXEIScientificInc.
Foreword
Atom probe tomography has had explosivegrowthinrecent years. Thetechnique
wasbornwaybackin1935whenEdwinMu¨llerinventedthefieldemissionelectron
microscope.Thisoriginalatomprobeinstrumentwasdifficulttouseandcouldonly
beappliedtometals.Modern-dayatomprobetomographyisstraightforwardtouse
and can be applied not only to metals but also to semiconductors, ceramics,
geologicalmaterials,organicmaterials,biologicalmaterials,andcomposites.
This is a wonderful book which should be in every science library and on the
bookshelves of scientists and engineers interestedin the characterization ofmate-
rials at the atomic level. The book requires no prior knowledge of atom probe
tomographyandtakesreadersthroughfromthehistoryofthelocalelectrodeatom
probe tothe latest developments inthe field. Although atom probe tomography is
nowaneasytechniquetouse,theinterpretationoftheresultsrequiresconsiderable
care and understanding. This book takes readers step by step through data collec-
tion, data reconstruction, and data analysis. As with all microscopies, good speci-
men preparation is the key to obtaining world-class results. Various methods of
specimen preparation are described in detail, together with clear instructions on
how to optimize specimen preparation using, for example, focused ion beam
methods.
Itisagreatpleasureformetorecommendthiscomprehensiveyetveryreadable
bookonthelocalelectrodeatomprobe,whichcomplementsothermethods,suchas
atomicresolutionelectronmicroscopy.Ibelievethatatomprobetomographywill
increasinglybeusedbyscientistsandengineersinvolvedwiththecharacterization
ofmaterialsanddevicesattheatomiclevel.Ihavenodoubtthatthisexcellentbook
willbewidelyusedbytheatomprobecommunity.
ProfessorSirColinJ.Humphreys
ProfessorofMaterialsScienceandDirectorofResearch
UniversityofCambridge
ix
