Table Of ContentSpringer Series in Optical Sciences Volume 67
Springer Series in Optical Sciences
Editorial Board: A. L. Schawlow K. Shimoda A. E. Siegman T. Tamir
Managing Editor: H. K. V. Lotsch
42 Principles of Phase Conjugation 56 X· Ray Microscopy II
ByB. Ya. Zel'dovich, N. F. Pilipetsky, Editors: D. Sayre, M. Howells, J. Kirz, and
and V. V. Shkunov H. Rarback
43 X· Ray Microscopy 57 Single·Mode Fibers Fundamentals
Editors: G. SchmahlandD. Rudolph ByE.-G. Neumann
44 Introduction to Laser Physics 58 Photoacoustic and Photothermal Phenomena
By K. Shimoda 2ndEdition Editors: P. HessandJ. Pelzl
45 Scanning Electron Microscopy 59 Photorefractive Crystals
Physics of Image Formation and Microanalysis in Coherent Optical Systems
ByL.Reimer By M. P. Petrov, S. 1. Stepanov,
andA.V. Khomenko
46 Holography and Deformation Analysis
By W. Schumann, J. -P. Ziircher, and D. Cuche 60 Holographic Interferometry
in Experimental Mechanics
47 Tunable Solid State Lasers By Yu. 1. Ostrovsky, V. P. Shchepinov,
Editors: P. Hammerling, A. B. Budgor, andV. V. Yakovlev
andA.Pinto
61 Millimetre and Submillimetre Wavelength Lasers
48 Integrated Optics By N. G. Douglas
Editors: H. P. Nolting and R. Ulrich
62 Photoacoustic and Photothermal Phenomena II
49 Laser Spectroscopy VII Editors: J. C. Murphy, J. W. Mac1achlan Spicer,
Editors:T. W. HănschandY. R. Shen L. C.Aamodt, andB. S. H. Royce
50 Laser-Induced Dynamic Gratings 63 Electron Energy Loss Spectrometers
ByH. J. Eichler, P. Giinter, andD. W. Pohl
The Technology of High Performance
51 Tunable Solid State Lasers for Remote Sensing ByH.lbach
Editors: R. L. Byer, E. K. Gustafson, 64 Handbook of Nonlinear Optical Crystals
and R. Trebino ByV. G. Dmitriev, G. G. Gurzadyan,
52 Tunable Solid· State Las~s II and D. N. Nikogosyan
Editors: A. B. Budgor, L. Esterowitz, 65 High· Power Dye Lasers
and L. G. DeShazer Editor: F. J. Duarte
53 The CO, Laser ByW. J. Witteman 66 Silver Halide Recording
54 Lasers, Spectroscopy and New Ideas Materials for Holography and Their Processing
ATribute to Arthur L. Schawlow By H. I. Bjelkhagen
Editors: W. M. Yen and M. D. Levenson
67 X·Ray Microscopy III
55 Laser Spectroscopy VIII Editors: A. G. Michette, G. R. Morrison,
Editors: W. Persson and S. Svanberg and C. J. Buckley
Volumes 1-41 are listed on the back inside caver
A. G. Michette G. R. Morrison
C. J. Buckley (Eds.)
X-Ray Microscopy III
Proceedings of the Third International
Conference, London, September 3-7,1990
With 359 Figures
Springer-Verlag Berlin Heidelberg GmbH
ALANG. MICHETTE,Ph. D.
GRAEMER. MORRISON,Ph. D.
CHISTOPHER J. BUCKLEY, Ph. D.
Physics Department, King's College London, The Strand, London WC2R 2LS, United Kingdom
Editorial Board
ARTHUR L. SCHAWLOW, Ph. D. Professor ANTHONY E. SIEGMAN, Ph. D.
Department of Physics, Stanford University Electrica! Engineering
Stanford, CA 94305, USA E. L. Ginzton Laboratory, Stanford University
Stanford, CA 94305, USA
Professor KOICHI SHIMODA, Ph. D.
THEODOR TAMIR, Ph. D.
Faculty of Science and Technology
Keio University, 3-14-1 Hiyoshi, Kohoku-ku Polytechnic University
Yokohama 223, Japan 333 Jay Street, Brooklyn, NY 11201, USA
Managing Editor: Dr. HELMUT K. V. LOTSCH
Springer-Verlag, Tiergartenstrasse 17, W-6900 Heidelberg, Fed. Rep. of Germany
ISBN 978-3-662-13894-6
Library of Congress Cataloging-in-Publication Data. X-ray microscopy III: proceedings of the third interna
tional conference, London, September 3-7, 1990 1 A. Michette, G. Morrison, C. Buckley (eds.). p. cm. -
(Springer series in optica! sciences; v. 67) Includes bibliographical references and index.
1. X-ray microscope-Congresses. I. Michette, Alan G. II. Morri-
ISBN 978-3-662-13894-6 ISBN 978-3-540-46887-5 (eBook)
DOI 10.1007/978-3-540-46887-5
son, G. (Graeme), 1955-. III. Buckley, C. (Christopher), 1955-. IV. Title: X-ray microscopy 3. V. Title: X-ray
microscopy three. (DNLM: 1. Microscopy-instrumentation-congresses. 2. Microscopy-methods-congres
ses. 3. X-Ray-congresses. QH 212.X2 X7 1990] QH212.X2X24 1992 502' .8'2-dc20 DNLM/DLC for Lib
rary of Congress 91-5220
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© Springer-Verlag Berlin Heidelberg 1992
Originally published by Springer-Verlag Berlin Heidelberg New York in 1992
Softcover re print of the hardcover 1s t edition 1992
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Preface
The growth of interest and research activity in X -ray microscopy is reflected in the
increasing size and scope of a related series of international conferences, the latest
of which (XRM90) was held at King's College London (3-7 September 1990)
with over 130 delegates. Previous conferences in Gottingen and Brookhaven
resulted in books in the Springer Series in Optical Sciences, and this volume, the
proceedings of XRM90, maintains this tradition. Because of the large number of
papers their lengths were strictly limited and, while most papers can be directly
identified with conference presentations, in a few cases those on similar topics
by the same authors have been combined into a longer paper to allow better
use of the space. The book is divided into six parts, with Parts IT-VI covering
the major areas of interest at the conference. In Part 1 are two overviews; Ron
Burge presented the opening paper of the conference, while the closing, summary,
contrlbution by Janos Kirz is included here as a comprehensive introduction to
the remainder of the book.
Part IT covers developments in X -ray sources and optics. The high average
brightnesses of synchrotron radiation sources have made many applications pos
sible, while the more convenient, laboratory-based, plasma sources offer much
promise for the future. Several contributions report significant advances in X-ray
optics, which must clearly continue fully to exploit the latest sources.
Part fi is concemed with X-ray imaging using a wide variety of contrast
mechanisms, while Part N includes papers on theoretical aspects of image for
mation, on the advantages ofusing harder X-rays, on optical constants, and on the
constraints placed by radiation damage on the imaging of biological specimens
in particular.
Part V is devoted to technical aspects of microscopy; modern instruments
are founded on a series of technical advances, and on increasing ingenuity in the
development of scanning stages, environmental specimen chambers, detectors and
X-ray transmissive membranes. These advances have facilitated the immensely
encouraging emergence of many applications, as described in Part VI. Many of
these are concemed with the imaging of hydrated (live as well as fixed) biological
tissue, while microanalytical techniques are becoming more widely used both for
biology and for materials science. This section concludes with some papers that
place the developing science of X-ray microscopy in a wider context and compare
and contrast it with established techniques.
The compilation of these proceedings has been enjoyable but arduous, and
the editors gratefully acknowledge the assistance ofmanypeople. We particularly
v
wish to thank the other members of the local organizing committee - Ron Burge,
Phil Duke and Albert Franks - and the staff at Springer-Verlag for their patience
and assistance during the lengthy editorial procedures.
London, September 1991 Alan Mic11ette
Graeme Morrison
Chris Buckley
VI
Contents
Part 1 Introduction to X-Ray Microscopy 1990
Introduction to Soft X-Ray Microscopy
By R.E. Burge ........................................ 3
XRM90 Conference Summary
By J. Kirz ........................................... 11
Part II X-Ray Sources and X-Ray Optics
The Development of Synchrotron Radiation Sources
and X-Ray Microscopy at the Photon Factory
By M. Ando and Y. Kagoshima (With 5 Figures) ................ 23
Compact SR-Source AURORA, and Its Application
to X-Ray Microscopy
~y H. Yamada, H. Nakabushi, Y. Kinjo, K. Shinohara, H. Nakano,
N. Watanabe, and H. Kihara (With 4 Figures) ................... 30
Coherent Radiation for X-Ray Imaging:
The Performance of the X1A Beamline at the NSLS
By S. Lindaas, H. Rarback, H. Ade, C. Buckley, S. Hellman, M. Howells,
C. Jacobsen, J. Kirz, 1. McNulty, M. Oversluizen, D. Shu,
and S. Williams (With 2 Figures) ........................... 34
Soft X-Ray Emission from a Laser-Produced Carbon Plasma
By M. Kiihne and R. Thomagel (With 1 Figure) ................. 39
Repetitive Laser-Plasma X-Ray Source for Microscopy Applications
By H. Daido, G.M. Zeng, T. Togawa, H. Aritome, M. Nakatsuka,
and S. Nakai (With 1 Figure) .............................. 43
Laser-Produced Plasma as a Source for X-Ray Microscopy
By H. Kim, B. Yaakibi, J.M. Soures, and P.C. Cheng (With 9 Figures) 47
High Repetition Rate Laser-Plasma X-Ray Source for Microscopy
By I.C.E. 1\ucu, G.J. Tallents, M.S. Schulz, and A.G. Michette
(With 4 Figures) ....................................... 54
VII
A Study of the Feasibility of X-Ray Microscopy
with a Laser-Plasma Source
By M.S. Schulz, A.G. Michette, and R.E. Burge (With 3 Figures) 58
A Plasma Source for an Imaging X-Ray Microscope
By R. Lebert, R. Holz, D. Rothweiler, F. Richter, and W. Neff
(With 5 Figures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 62
A Laboratory X-Ray Microscope with a Plasma X-Ray Source
By G. Schmahl, B. Niemann, D. Rudolph, M. Diehl, J. Thieme, W. Neff,
R. Holz, R. Lebert, F. Richter, and G. Herziger (With 5 Figures) '" . .. 66
2-D X-Ray Focusing by Circular Phase Bragg-Fresnel Lenses
at a Bragg Angle Close to 7r/2
By V.V. Aristov, Yu.A. Basov, A.A. Snigirev, M. Belakhovsky, P. Dhez,
and A. Freund (With 7 Figures) ............................ 70
Nanofabrication of Zone Plates for X-Ray Microscopy
By E.H. Anderson and D. Kern (With 3 Figures) ................ 75
The Status of Zone Plate Fabrication at King's College London
By P.S. Charalambous and D. Morris (With 3 Figures) ............ 79
Germanium Phase Zone Plates with High Aspect Ratios
for X-Ray Microscopy Experiments
By 1. Thieme, D. Rudolph, G. Schmahl, P. Guttmann, B. Greinke,
and M. Diehl (With 2 Figures) ............................. 83
ElectroplatedNickel Phase Zone Plates Generated by Laser Lithography
and Electron-Beam Lithography
By C. David (With 3 Figures) ............................. 87
Focusing and Imaging Properties of a Nickel Phase Zone Plate
By H. Fujisaki, N. Nakagiri, H. Kihara, N. Watanabe, Y. Shimanuki, and
Y. Nagai (With 4 Figures) ................................ 90
Experiments for the Construction of Sputtered Sliced Zone Plates
By R. Hilkenbach (With 3 Figures) .......................... 94
Investigations on the Ag2S/GeS2-Inorganic Photoresist System
for the Fabrication of High Resolution Zone Plates
By 1. Ingwersen (With 2 Figures) ........................... 98
Experiments in Zone Plate Replication
Using Spatial Frequency Multiplication at X-Ray Wavelengths
By C. Jacobsen and S. Lindaas (With 1 Figure) ................. 101
Evaluation of the Efficiency of Zone Plates with High Aspect Ratios
by Application of Coupled Wave Theory
By J. Maser (With 2 Figures) .............................. 104
X and XUV Microscopes Based on Mirror Optics
By P. Dhez (With 4 Figures) .............................. 107
VIII
Grazing Incidence Relay Optics for X-Ray Microscopy
By S. Aoki and S. Sudo (With 5 Figures) ..................... 114
Fabrication of Multilayer Mirror Zone Plates and Gratings for U se
with Soft X-Rays
By C. Khan Malek, T. Moreno, H. Berrouane, J.M. Andre, Ph. Guerin,
F.R. Ladan, A. Gloukhian, S. Fouchet, R. Rivoira, and R. Barchewitz
(With 2 Figures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 118
Fabrication of Gold and Thngsten Subhalfmicron Absorbing Pattems
for High Resolution Transmission Diffractive Optics
By C. Khan Malek, B. Kebabi, F.R. Ladan, and F. Carcenac
(With 1 Figure) ....................................... 122
Characteristics of a Multilayer Schwarzschild Objective
By A.G. Michette, C.J. Buckley, M. Kiihne, and P. Miiller
(With 3 Figures) ....................................... 125
Preparation and Evaluation of Grazing Incidence Aspherical Mirrors
with Multilayer Films
By K. Nakajima, S. Aoki, and S. Sudo (With 4 Figures) ........... 128
X-Ray Optics Using Capillary Arrays
By H.N. Chapman, K.A. Nugent, S.W. Wilkins, A.V. Rode,
A.W. Stevenson, T.l Davis, and B. Luther-Davies (With 2 Figures) ... 131
Galvanoplastic X-Ray Microscopes and Their Applications
By R. Hudec, B. Valnieek, T. Gersbnan, A. Inneman, P. Nejedly,
L. Svătek, and J. Vftek .................................. 134
Part III X-Ray Imaging and Related Topics
Recent Progress with the King's College Scanning Transmission
X-Ray Microscope
By G.R. Morrison, P.A.F. Anastasi, M.T. Browne, C.J. Buckley,
R.E. Burge, P.S. Charalambous, G.F. Foster, A.G. Michette, D. Morris,
J.R. Palmer, G.E. Slark, P.M. Bennett, and P.J. Duke (With 2 Figures) . 139
X-Ray Microscopy with the GOttingen Scanning X-Ray Microscope
at 2.4 nm
By B. Niemann (With 3 Figures) ........................... 143
Soft X-Ray Microscopy with Zone Plates at UVSOR
By N. Watanabe, M. Taniguchi, Y. Shimanuki, K. Kawasaki,
Y. Watanabe, Y. Nagai, and H. Kihara (With 4 Figures) . . . . . . . . . . .. 147
New Version Soft X-Ray Microscope at the Photon Factory
By Y. Kagoshima, S. Aoki, and M. Ando (With 2 Figures) . . . . . . . . .. 151
IX
