Table Of ContentNANOTRIBOLOGY
Critical Assessment and Research Needs
NANOTRIBOLOGY
Critical Assessment and Research Needs
edited by
Stephen M. Hsu
and
Z. Charles Ying
National Institute of Standards and Technology
Gaithersburg, MD, U.S.A.
SPRINGER SCIENCE+BUSINESS MEDIA, LLC
Library of Congress Cataloging-in-Publication Data
NANOTRIBOLOGY: Critical Assessment and Research Needs
Edited by Stephen M. Hsu and Z. Charles Ying
ISBN 978-1-4613-5356-0 ISBN 978-1-4615-1023-9 (eBook)
DOI 10.1007/978-1-4615-1023-9
Copyright © 2003 by Springer Science+Business Media New York
Originally published by Kluwer / Plenum Publishers, New York in 2003
Softcover reprint of the hardcover 1st edition 2003
All rights reserved. No part of this publication may be reproduced, stored in a
retrieval system or transmitted in any form or by any means, mechanical, photo
copying, recording, or otherwise, without the prior written permission of the
publisher, Kluwer Academic Publishers, 101 Philip Drive, Assinippi Park, Norwell,
Massachusetts 02061.
Permission for books published in Europe: [email protected]
Permissions for books published in the United States of America: [email protected]
Printed on acid-free paper.
Table of Contents
Preface ........................................................................... VIII
Summary of Findings ......................................................... 1
1. Nanotribology and the NSF
Jorn Larsen-Basse ......................................................... 15
2. MEMS Program at DARPA
William C. Tang ......................................................... 23
3. Scale Effects and the Molecular Origins of Tribological
Behavior
Gang He and Mark O. Robbins .......................................... 29
4. Nanoscale Analysis of Wear Mechanisms
Koji Kato .................................................................. 45
5. Dependence of Frictional Properties of Hydrocarbon Chains
on Tip Contact Area
Judith A. Harrison, Paul T. Mikulski, Steven J. Stuart and
Alan B. Tutein ............................................................ 55
6. Nanohydrodynamics and Coherent Structures
H.G.E. Hentschel and I. Tovstopyat-Nelip ........................... 63
7. Modeling Adhesive Forces for Ultra Low Flying Head Disk
Interfaces
Andreas A. Polycarpou ................................................... 79
8. Self-Lubricating Buckyballs and Buckytubes for
Nanobearings and Gears: Science or Science F(r)iction?
M. N. Gardos ................................ , .............................. 95
9. Carbon Nanotubes: Objects of Well-Defined Geometry for
New Studies in Nanotribology
Min-Feng Yu, Mark J. Dyer and Rodney S. Ruoff .................. 109
NANOTRlBOLOGY vi
10. A Novel Frictional Force Microscope with 3-Dimensional
Force Detection
M. Dienwiebel, J. A. Heimberg, T. Zijlstra, E. van der Drift,
D. J. Spaanderman, E. de Kuyper and J. W. M. Frenken .. , ......... 115
11. Quantification of Friction in Microsystem Contacts
Michael T. Dugger ......................................................... 123
12. Nanoengineering and Tribophysics for MEMS
K. Komvopoulos ................................. '" ..................... 139
13. Materials and Reliability Issues in MEMs and Microsystems
Aris Christou ............................................................... 165
14. Surface Characteristics ofIntegrated MEMS in High
Volume Production
Jack Martin ............................................................... 177
15. Tribological Issues in the Implementation of a MEMS-Based
Torpedo Safety and Arming Device
Wade G. Babcock ......................................................... 185
16. Challenges for Lubrication in High Speed MEMS
Kenneth Breuer, Frederic Ehrich, Luc Frechette, Stuart Jacobson,
C-C Lin, DJ. Orr, Edward Piekos, Nicholas Savoulides and
Chee-Wei Wong .............................. '" '" ....... , ............. 197
17. Electrical Phenomena at the Interface of Rolling-Contact,
Electrostatic Actuators
Cleopatra Cabuz ......................................................... 221
18. The Use of Surface Tension for the Design of MEMS
Actuators
Chang-Jin "CJ" Kim ...................................................... 239
19. Mesoscale Machining Capabilities and Issues
Gilbert L. Benavides, David P. Adams and Pin Yang ............... 247
vii Table of Contents
20. An Overview of Nano-Micro-Meso Scale Manufacturing at
the NIST
Edward Amatucci, Nicholas Dagalakis, Bradley Damazo,
Matthew Davies, John Evans, John Song, Clayton Teague and
Theodore Vorburger ...................................................... 259
21. LIGA-Based Micromechanical Systems and Ceramic
Nanocomposite Surface Coating
W. J. Meng, L. S. Stephens and K. W. Kelly ........................ 271
22. Nanotribology of Thin Film Magnetic Recording Media
T. E. Karis .................................................................. 291
23. Nanolubrication: Concept and Design
Stephen M. Hsu .............................. '" ........................ '" 327
24. Molecularly Assembled Interfaces for Nanomachines
Vladimir V. Tsukruk ...................................................... 347
25. STM-QCM Studies of Vapor Phase Lubricants
B. Borovsky, M. Abdelmaksoud and J. Krim ........................ 361
26. Micro-Hardness and Micro-Wear Measurements on
Magnetic Heads
V. Prabhakaran, F. E. Talke and J. T. Wyrobek ..................... 377
27. Bonding and Interparticle Interactions of Silica
Nanoparticles
James D. Batteas, Marcus K. Weldon and
Krishnan Raghavachari ................................................... 387
28. Macroscale Insight from Nanoscale Testing
Steven R. Schmid and Louis G. Hector, Jr. .. ......................... 399
29. Surface Forces and Friction Between Cellulose Surfaces in
Aqueous Media
Stefan Zauscher and Daniel J. Klingenberg ........................... 411
Index ............... '" .............................................. , ............. 441
PREFACE
This book is based on the Nanotribology Workshop held at the National
Institute of Standards and Technology in Gaithersburg, Maryland, on March
13-15, 2000. Nearly 100 leading researchers from the academia,
government, and industry in nanotribology, microelectromechanical systems
(MEMS), nanotechnology and meso-manufacturing attended the Workshop.
The purpose of the Workshop was to critically assess the current state-of
the-art of nanotribology within the context of MEMS, meso-manufacturing,
nanotechnology and microsystems, to identify gaps in current knowledge
and barriers to applications, and to recommend research areas that need to
be addressed to enable the rapid development of these technologies.
The trend to miniaturize mechanical, electronic and optical components
has been ongoing in the last several decades and the pace has accelerated in
recent years. Advances in semiconductor processing, sensors, actuators, and
microprocessors have made possible the development of revolutionary
technologies such as MEMS, smart structures, micro-engines, smart
controllers, lab-on-a-chip devices, and micro-biomedical devices, which
have abilities to sense/detect, compute, and activate/control in real time.
Coupled with neural network and artificial intelligence, manufacturing
processes will enter a new era of intelligent manufacture unthinkable a
decade ago.
Integration of sensing and computing to actuation is currently in its
embryonic stage. Rapid actuation requires fast moving contacting surfaces.
Frictional heating associated with moving parts requires innovative
materials as well as creative design. Adhesion and stiction become the
dominant issues for durability and reliability of MEMS devices.
Nanotribology deals with friction, wear, and lubrication of interacting
surfaces. in relative motion at the nanometer scale. Current advances in
magnetic recording, MEMS, nanotechnology, meso-manufacturing, and
microsystems technology all involve the basic issues of friction, wear,
adhesion, and lubrication. Micromachines and normal miniaturization
demands also are pushing the scale of investigation of nanotribology smaller
and smaller. Many phenomena at small scales present new challenges in
concept as well as practice. In the last several years, some of the important
issues in nanotribology such as scaling laws, measurement and handling
problems, contamination issues, and modeling have begun to be addressed.
While these issues have often been dealt with at macroscale, nanoscale
phenomena have only been dealt with at the molecular dynamics and
atomically flat surface levels. Much is unknown at this time. Measurement
ix Preface
of friction and wear at nanometer scale, for example, is problematic at best.
Atomic force microscope and its modifications are often used, but the issues
are many; statically sampling, localized deformation, tip-substrate
interactions, and environmental effects (e.g., water condensation and the
resultant meniscus) often make the results difficult to reproduce. "Simple"
nanomechanical property measurement of materials is equally difficult.
Nanotribology is a new field and current research efforts in
nanotribology are scattered through the communities in physics, electronics,
MEMS, microprocessors, surface sciences, materials, mechanical
engineering, and tribology. The issues in each of the technology areas have
different technical communities working on them; communication and
exchange of ideas have been problematic. A public forum to exchange
information across a wide spectrum of disciplines is needed to provide
cooperation and mutual support. It was the purpose of this Workshop to
invite these communities on a worldwide basis to come together to share
common technical issues, provide assessments, and together identify areas
that have the maximum impact across the technologies.
In addition to oral and poster presentations, the Workshop organized
extensive discussion sessions that covered areas of nanotechnology, MEMS,
mesomanufacturing, and nanolubrication. The discussions were focused on
theoretical needs, measurement challenges, materials requirements, and
barrier to applications. The findings of the discussion sessions are
summarized in Chapter 1 of this book.
Chapters 2 and 3 present overviews of the nanotribology programs
supported by the National Science Foundation and the MEMS programs
supported by the Defense Advanced Research Projects Agency,
respectively.
Theoretical studies on nanotribology are presented in Chapters 4 to 8.
Chapter 4 discusses breakdown of continuum behavior at nanometer scales
and, using the molecular dynamics (MD) simulation technique, explores the
origin of friction at the molecular level. Also using the MD technique,
Chapter 5 investigates three abrasive wear mechanisms: cutting, wedging
and plowing. Chapter 6 reports MD studies of frictional forces between
hydrocarbon chains and a nanotube or a diamond tip, especially dependence
of frictional properties on tip contact area. Hydrodynamics or flow of
lubricant at nanometer scale is studied numerically in Chapter 7. The last
chapter on theory, Chapter 8, models the adhesive force at the interface
between a magnetic storage disk and an ultralow flying head.
The next two chapters explore applications of fullerenes and nanotubes
for nanotribology, particularly as self-lubricating nanobearings and
nanogears (Chapter 9) and as probe tips for atomic force microscopy
(Chapter 10).
NANOTRIBOLOGY x
Novel instrumentation for quantitative nanotribology measurements is
urgently needed. Design, fabrication, and performance of a "tribolever,"
which allows quantitative measurements of frictional forces without the
shortcomings associated with the cantilever probes commonly used in
friction force measurements, are described in Chapter 11. Chapter 12
presents a MEMS-based device that permits quantitative measurements of
frictional forces at surface of micromachined sidewall contacts and study of
environmental effects using this device.
Nanotribology research is intimately associated with research and
development in MEMS, meso-scale machining, and magnetic recording
industry. Chapters 13 and 14 present overviews ofnanotribology, materials,
and reliability issues associated with MEMS. The following four chapters
discuss development of MEMS-based accelerometer (Chapter 15), safety
and arming devices for weapons especially torpedoes (Chapter 16), high
speed rotating MEMS devices (Chapter 17), and electrostatic actuators
(Chapter 18), plus technology challenges to the nanotribology community
that are associated with these MEMS devices. Chapter 19 presents several
novel designs of MEMS actuators, including a microinjector, a bubble
pump, a micromechanical switch, and a liquid micrometer, that fully utilize
surface tension at nanometer scale.
The next two chapters describe meso-scale machining capabilities
developed at the Sandia National Laboratories (Chapter 20) and at the
National Institute of Standards and Technology (Chapter 21) plus the
technical issues associated with meso-scale machining. As a specific
example, Chapter 22 presents fabrication and testing of prototype face seals
with embedded micro-heat-exchangers based on X-ray microfabrication
technique.
Chapter 23 describes lubricants used on magnetic recording media, the
properties and testing methods used in the magnetic recording industry.
Development of lubricants and study of lubrication phenomena at the
nanometer scale are of current focus in nanotribology. Chapter 24 discusses
concepts and designs of nanolubrication. Chapter 25 presents current
development of molecularly assembled interfaces with emphasis on future
needs and possible fabrication methods of these interfaces for
nanomachines. Experimental research of gas-phase lubricants using a
combination of scanning tunneling microscopy and quartz crystal
microbalance in vacuum is presented in Chapter 26.
The final four chapters of the book present research on wear at the
nanometer scale. Chapter 27 describes study of wear of diamond-like
carbon overcoats on magnetic-recording heads. Experimental research using
atomic force microscopy on adhesion at silica nanoparticle surfaces and on
single-asperity plowing of aluminum surface is presented in Chapters 28 and
29, respectively. Chapter 30 describes study normal forces and sliding
xi Preface
friction forces between cellelose surfaces in aqueous solution using scanning
probe microscopy.
The Nanotribology Workshop was sponsored by the National Science
Foundation, Defense Advanced Research Projects Agency, University of
Maryland, National Institute of Standards and Technology, and Sandia
National Laboratories. Their financial support of the Workshop is
acknowledged.
We express appreciation to the session chairs for the assistance they
provided during the Workshop. Special thanks go to the chairs of the
breakout discussion sessions, who not only organized the discussion
sessions and also provided summary reports, which are the basis for Chapter
I of this book.
Finally, we would like to thank the editorial and production staff at
Kluwer Academic Publishers, especially Editor Jennifer Evans, Editor Rob
Zeller, and Ms Anne Murray for their support and patience.
Stephen M. Hsu
Z. Charles Ying
Gaithersburg, Maryland
